直接加熱轉(zhuǎn)筒式干燥機(jī),直接,加熱,轉(zhuǎn)筒式,干燥機(jī) 附錄A TRANSACTIONS OF MATERIAL SAND HEATTRE ATMENT Vol.25 No.5 PROCEEDINGS OF THE IFHTSE CONGRES October 2004 Dry Machining Tool Design via Chlorine Ion Implantation Tatsuhiko Aizawa1, Atsushi Mitsuo2, Shigeo Yamamoto2, Shinji Muraishi3, Taro Sumitomo1 1. Center for Collaborate Research, University of Tokyo, Tokyo, Japan 2. Tokyo Metropolitan Industrial Research Institute, Tokyo, Japan 3. Department of Materials Science Technology, Tokyo Institute of Technology, Tokyo, Japan Abstract: Dry machining has become a key issue to significantly reduce the wastes of used lubricants and cleaning agents and to improve the environmental consciousness for medical and food applications of special tooling. Since the tools and metallic works are in direct contact in dry, severe adhesive wear and oxidation are thought to occur even at the presence of hard protective coatings. Self-lubrication mechanism with use of lubricous oxide films is found to be effective for dry machining. Through the chlorine ion implantation to tools, titanium base oxides are in-situ formed on the tool surface. This oxide deforms elas to-plastically so that both friction coefficient and wear volume are reduced even in the high-speed cutting. Keywords: Dry machining, Chlorine ion implantation, Self lubrication, WC tool, TIN coating, TiCN coating DRY MACHINING is a keyword for manufacturing and production science in the twenty-first century, which requires significant reduction of environmental burden and COi emission11. In the modern high-speed wet and semi-dry machining processes, huge amounts of lubricants and cleansing agents are wasted in daily production . Among various proposals aiming at the dry machining , in-situ formation of tribo-filrns must be an important concept to make dry machining tools .Authors have pointed out the importance on the role of in-situ formed lubricious oxide films to attain low friction and wearing state in dry. Self-lubrication is accommodated to titanium and titanium ceramic coatings via chlorine ion implantation into them. In the present paper, self-lubrication via chlorine ion implantation is applied to dry machining. Various tool and work materials are utilized to understand the dry machining tool design for high speed machining. In the case of dry-machining the steel work by bare cemented carbide tools, lower friction and wear state can be realized by self-lubrication process. Wear in the Cl-implanted, ceramic-coated tools is also significantly reduced even in the higher cutting speed range. 1. Dry Machining Tool Design As had been discussed in 10-11), two key items must be considered to make dry machining tool design. At first, the surface zone of tool materials or protective coating films is to be changed to a lubricous mono-oxide film. When titanium mono-oxide film is formed on the surface, low friction and wear state is attained by its plastic deformation at high normal pressure during cutting. Furthermore, this titanium mono-oxide is transformed to intermediate oxides or Magneli-phase oxides by oxidation during dry cutting. These oxide films have also a potential of plastic deformation so that low friction and wear state should be sustained even with increasing the cutting speed. In order that the above self-lubrication process should work in dry machining, both work and tool materials must be adequately selected together with optimization of chlorine ion implantation conditions. In the second, cutting tool shape is also optimized not only to reduce the friction and wear but also to prolong the life time of tools. Direct work-tool interaction in dry machining is difficult to describe. The tool surface shape optimization is still dependent on the skills. This difficulty in shape optimization can be relaxed by using the in-situ tribo-film coating. Since the tribo-film is formed at the vicinity of cutting edge, the cutting tool shape is slightly modified to fulfill the steadily high speed cutting in dry. In-situ formation of titanium base oxide tribofilms requires a titanium source to yield oxides via tribo-chemical surface reaction in dry machining. One is titanium included in steel work. To be explained later, since titanium is used for de-oxidation process in steel making, its nitrides or carbides distribute as an inclusion in work material. The other is titanium-base ceramics included in the tool material. TiC is usually included in cemented carbide tools. TiN, TiC or TiCN are typical constituents of protective ceramic coating films for cutting tools. As had been discussed in 11-13), the former titanium source is often very important for control of insitu-formed tribofilm on the surface of tools. 2. Experimental Procedure How to prepare tool and work materials is explained as well as the chlorine implantation and the turning test. 2.1 Preparation of Tools The throw-away cemented carbide tools were selected as a specimen. They were shaped triangular without chip-breakers on their rake face. Two types of cemented carbide tools with P10 and P30 were used as a bare tool material. In order to investigate the effect of ceramic protective coating on the improvement of machinability, TiCN coating with alternative layers of TiN and TiC was deposited as a multi-thin later on the cemented carbide tool of the type of P10. To be noted, TiC was invoked in both cemented carbides. 2.2 Chlorine Implantation Ion implanter for Cl-implantation to cutting tools is depicted in Fig. 1. The tool specimens were mounted on a target manipulator and irradiated by scanning the beam of Cl ions. Ion beam was generated from A1C13 in a Freeman type ion source with a vaporizer and mass-selected to yield single, positive-charged chlorine beam of Cl . The dose of chlorine ions was constant 1.0 x 1017 ions/cm2 with the implantation energy of 100 keV. The chlorine ions were implanted into both the rake and the flank faces of specimen. The incident angle was fixed to normal to the tool surface and the vacuum was controlled to be less than 2 x 10"5 Pa during implantation. To suppress the heating by the ion beam itself, the beam current density was limited to 0.03 - 0.05 A/m2 throughout the process. Fig. 1: Ion implanter for chlorine ion implantation to cutting tools. 2.3 Turning Test Turning tests were conducted for the evaluation of dry machinability. Both the cutting depth (Dc) and the feed (f) were fixed to be constant: Dc = 1.0 mm and f = 0.1 mm/rev. The cutting speed was varied from 10 m/min to 500 m/min. Figure 2 illustrates the mechanical interaction between workpiece and tool. Using a lathe equipped with axial load sensors, both the reactive and feed forces were measured respectively. Two types of worn surfaces were observed in the turning tests: flank wear width (VB) and the crater wear width (kT). Steel with the type of S45C after de-oxidation by addition of titanium was employed as work material. Its main chemical composition was 0.44 mass% C, 0.34 mass% Si, 0.80 mass% Mn together with 0.01 mass% Ti. Oxygen content was controlled to be 0.0011 mass %. Other contents of phosphorous, sulphur, copper, nickel and chromium were suppressed to be less than 0.001 mass %. 2.4 Characterization A laser microscope was first used to observe the in-situ formation of tribo-films on the tool surface. Various oxide formation on the tool surface was detected by using EDS (Energy Dispersive Spectroscopy) Fig. 2: Mechanical interaction between workpiece and tool in this turning test. 3. Experimental Results and Discussion Bare WC-tools and TiCN-coated WC-tools were selected to investigate the effect of chlorine ion implantation into tool materials on the dry machinability. 3.1 Cl-Implantation to Bare WC-Tool In the turning tests, both Fc and Fs were measured to estimate the friction coefficient. Figure 3 depicts the measured friction coefficient with increasing cutting speed (Vc) for bare WC and Cl-implanted WC tools. The friction coefficient (u) of bare WC had maximum for 40 m/min < Vc < 100 m/min, e.g. (i = 0.8. For Vc > 100 m/min, jo. decreased steadily with Vc. In case of Cl-implanted WC tools, (J. in the higher cutting speed range decreased with Vc from 0.7 to 0.75 for Vc = 40 to 100 m/min. It became the lowest at Vc = 300 m/min, e.g. [i = 0.58 while ^ = 0.65 for bare WC tools. This low friction coefficient in the higher cutting speed range is attained by the present Cl-implantation. 3.2 Cl-Implantation to TiCN Coatings In the turning test of titanium bearing workpiece, the self-lubrication process only worked in the higher cutting speed region. The tribofilm of titanium base oxides was difficult to form on the tool materials due to less amount of titanium source. On the other hand, the tribofilm is easy to be formed via the chlorine ion implantation to titanium base ceramic coating films, like TiCN. In the case of Cl-implantation to TiCN-coated tools, the self-lubrication process could work well in all cutting speed. Fig. 3: Comparison of friction coefficient between bare WC and Cl-implanted WC tools. Figure 4 compared the flank wear width after a cutting length of 500 m between TiCN coated and Cl-implanted TiCN-coated WC tools for various cutting speeds. The flank wear width significantly reduced by the chlorine ion implantation to TiCN coating films. For Vc > 300 m/min, the flank wear increased exponentially with Vc for TiCN-coated WC tools. Severe oxidation wear of TiCN takes place in dry condition at higher cutting speeds. In the case of Cl-implanted TiCN-coated tools, the flank wear only increases linearly with the cutting speed. In particular, VB = 55 Jim after a cutting length of 500 m at a cutting speed of Vc = 500 m/min. Fig. 4: Comparison of the flank wear width (VB) between TiCN coated and Cl-implanted TiCN-coatedWC tools. 3.3 Formation of Tribofilms Significant reduction of flank wear even at higher cutting speeds is a good proof to demonstrate that the self-lubrication process works effectively on the titanium base oxide tribo-films. Figure 5 shows the microstructure on the flank surface of Cl-implanted TiCN after the cutting length of 500 m at Vc = 400 m/min. At the vicinity of the cutting edge the film is formed on the flank surface. In literature, the belag is expected to be working as a protective layer of tools 14) . In general, this type of films is composed of various oxides; the constituent metallic elements of workpiece or tools are oxidized during cutting at relatively high temperatures. In the case of adhesive wear, main constituents of workpiece material for example iron are easily and fast oxidized to form the hematite base oxide films. Fig. 5: Precise measurement of tool surface by the laser microscope. Fig. 6: Distribution oi Si, Mil, Ti, Fe anil O contents together with SEM micrograph. In the present dry machining, the formed film is never a simple mixture or compounds of oxides. Figure 6 depicts the distribution of silicon, manganese, titanium, iron and oxygen contents together with SEM micrograph. The in-situ formed film in Fig. 5 is divided into two regions: I- and Il-regions. The film in the I-region is mainly composed of TiOx. On the other hand, the II-region is a mixture of SiO2 and MnO. To be noted, both I- and Il-regions include much few iron contents; iron oxides did not deposit on the flank surface during dry machining. Since the measured flank wear width by the laser microscope corresponds to the I-region, the II-region is thought to have nothing to do with the reduction of friction and wear via Cl-implantation to TiCN coating films. In-situ formation of titanium base oxides has close relationship with self-lubrication process in this dry machining via the Cl-implantation. 4. Conclusion Dry machining performances of Cl-implanted cutting tools were investigated by turning test in dry condition for wide range of cutting speed up to 500 m/min. In the case of Cl-implantation to bare WC tools, both the friction coefficient and wear were significantly reduced. In the case of Cl-implanted TiCN-coated WC tools, the flank wear was much reduced even in the high cutting speed range. The flank wear width far exceeds over 100 |im at Vc = 500 m/min while VB = 55 Jim by Cl-implantation. This improvement of tribological performance in dry machining is attributed to the self-lubrication process on the in-situ formed titanium base oxide films. 　　Acknowledgment Authors would like to express their gratitude to Dr. T. Akhadejdamrong, Mtech, Thai for her help in experiment. This study is financially supported in part by the national project on the barrier-free processing and environmentally benign manufacturing from MEXT. References 1.T. Aizawa: Barrier-Free Processing. Ch. 9, Fundamentals and Applications in Ecomaterials. Nikka-Giren, 2002. 2 .K. Namba: Report on marketing research on super-hard alloy tools. CASTI, 2003. 3.Renevier M.M., Lobiondo N, Fox V.C., Teer D.G, Hampshire J.: Performance of MoS2/Metal Composite Coatings Used for Dry Machining and Other Industri Application. Surf. Coat. Technol., 2000, 123: 84-91. 4 .Derflinger, Brandle H., Zimmermann H.：Ne Hard/Lubricant Coating for Dry Machining. Surf. Coa Technol., 1999,113: 286-292. 5.Huu T.L., Paulmier D., Grabchenko A., Horvath M Meszaros I., Mamalis A.G, Autolubrication of Diamon Coatings at High Sliding Speed. Surf. Coat. Technol., 199108-109:431-436. 6 .Mitsuo A., Aizawa T: Improvement of Friction and We Performance of Titanium Nitride Films by Chlorine Io Implantation. Mater. Trans., 1999, 40(12): 1361-1366. 7.Aizawa T，Akhadejdarnrong T，Iwamoto C，Ikuhara Mitsuo A：Self-Lubrication of Chlorine-Implante Titanium Nitride Coating. J. Am. Ceram. Soc., 2002, 85(121-24). 8.Akhadejdamrong T, Aizawa T, Yoshitake M., Mitsuo A Feasibility，Study，of Self-lubrication，by Chlorin Implantation.Nucl. Instrum. Meth. Phys.Res, 2003, 297:45-54. 9.Akhadejdarnrong T， Aizawa T， Yoshitake M.,，Mitsuo A Yamamoto T，Ikuhara Y：Self-Lubrication Mechanism o Chlorine Implanted TiN Coatings. Wear, 2003, 25 668-679. 10.Aizawa T， Akhadejdarnrong T， Mitsuo A.：Self-Lubricatio of Nitride Ceramic Coating by the Chlorine Io Implantation. Surf. Coat. Technol., 2004, 177-178： 573-58 11 .Mitsuo A., Uchida S., Yamamoto S. and Aizawa T Improvement of Cutting Performance for Carbide Tools vi Chlorine Ion Implantation. Surf. Coat. Technol., 2004 (ipress). 12.Aizawa T，Mitsuo A., Yamamoto S， Sumitomo Muraishi S：Self-Lubrication Mechanism via the In-sit Formed Lubricious Oxide Tribofilms. Wear (to be published). 13.Aizawa T, Mitsuo A: Dry Forming by Cl-implanted Tool Jpn. J. Technology of Plasticity (to be published). 14.S. Yamamoto, Takamori S，Osawa Y，Sato A： Tool We of High Strength Free Cutting Steel without Lead. J. Jp Inst. Metal., 2001,65 (7)：614-620.Correspondingauthor: Dr.TatsuhikoAizawa. Email: aizawa@odin.hpm.rcast.u-tokyo.ac.jp. Mail address: 4-6-1 Komaba, Tokyo 153-8904, Japan. Tel & Fax: +81-3-5452-5116 材 料 沙 的 加 熱 處 理 2004年10月 經(jīng)氯離子注入進(jìn)行機(jī)械干燥機(jī)工具設(shè)計(jì) Tatsuhiko Aizawa1, Atsushi Mitsuo2, Shigeo Yamamoto2, Shinji Muraishi3, Taro Sumitomo1 1. 合作研究中心、位于日本東京的東京大學(xué) 2. 位于日本東京的東京工業(yè)研究所 3. 位于日本東京的東京技術(shù)學(xué)院，材料科學(xué)技術(shù)系 摘要:干燥機(jī)已成為一個關(guān)鍵問題,它可大大減少潤滑油及清潔劑使用過程中所產(chǎn)生的廢物，并提高醫(yī)療及食品應(yīng)用方面特殊工具的環(huán)保意識。 由于工具和金屬產(chǎn)品在干燥條件下直接接觸，機(jī)器嚴(yán)重受損，即使具有良好的保護(hù)涂層也會被氧化。自動注油機(jī)械原理使用lubricous氧化機(jī)制是對干燥機(jī)行之有效的處理。 通過將氯離子注入工具，在工具表面形成鈦氧化合物的保護(hù)層。這一氧化物毀壞ELAS，形成塑膠，即使在高速切割的條件下，配戴量及摩擦系數(shù)都會大大減少。 關(guān)鍵詞：干燥機(jī)，氯離子注入，自動注油，鑄工具，錫涂層，TICN涂層 機(jī)械干燥是一個關(guān)鍵詞,在21世紀(jì), 對于制造業(yè)生產(chǎn)科學(xué)是一個關(guān)鍵詞。必須大幅度減少環(huán)境負(fù)擔(dān),Cqi放射物11在現(xiàn)代高速潮濕和半干燥機(jī)械運(yùn)轉(zhuǎn)過程中，清洗劑、潤滑油在日常生產(chǎn)中巨額浪費(fèi)。各提案旨在機(jī)械干燥, Tribo-Filrns的原址形成重要概念在于必須使用干燥機(jī)工具。 作者指出,in-situ的重要作用在于形成lubricious氧化物以減少摩擦及配戴量。自動注油原理在于將氯離子注入到鈦材料、鈦陶瓷中。 本文自動注油將氯離子注入應(yīng)用于機(jī)械干燥。 利用各種工具和材料,了解干燥機(jī)械以設(shè)計(jì)出高速切削工具。 對于水泥碳化物為基礎(chǔ)的干燥機(jī),只有減少摩擦,才能實(shí)現(xiàn)自動注油過程。 具有CL-植入陶瓷保護(hù)層的工具，即使在高切削速度范圍也可大大減少摩擦。 1. 干燥工具的機(jī)械設(shè)計(jì) （曾在1910年至1911年討論）,兩次關(guān)鍵項(xiàng)目必須考慮干切削工具設(shè)計(jì)。 首先,工具的表面涂層或保護(hù)區(qū)將改成lubricous薄膜——單一氧化物薄膜。當(dāng)在表面形成鈦的單一氧化物薄膜，在高壓正常切割條件下，通過塑料變形，實(shí)現(xiàn)低摩擦低損耗。此外,單一鈦氧化物在干燥切割過程中被轉(zhuǎn)化成中級氧化物或氧化物Magneli。這些薄膜也有氧化塑料變形的潛能,使低摩擦, 即使提高切割速度，也可保持低摩擦低損耗。 為了實(shí)現(xiàn)上述的自動注油過程，必須有足夠的可供選擇的工具和材料，同時優(yōu)化氯離子注入條件。 其次,優(yōu)化刀具形狀不僅減少摩擦及損耗,而且延長工具的使用壽命。 很難描述干燥機(jī)中各工件的相互聯(lián)系。工具表面形狀優(yōu)化還是依靠技術(shù).可以利用Tribo片涂層減少形狀優(yōu)化上的困難。因?yàn)門ribo形成于切割邊緣附近，所以刀具形狀略有修改就可以實(shí)現(xiàn)干燥狀態(tài)下高速切割。 原址基礎(chǔ)組建鈦氧化物tribofilms需要鈦原料在干燥機(jī)中通過tribo化學(xué)物的表面反應(yīng)產(chǎn)生氧化物。一是煉鋼中的鈦。后面會加以解釋。由于鈦用于非氧化過程,它的carbides作為工作材料被分配。 另一種是列入工具材料中的鈦基陶瓷材料。通常包括靜態(tài)碳化物工具。錫是典型的作為切割工具陶瓷保護(hù)涂層薄膜的成分。（曾在1911年至1913年被討論）,前者鈦源往往對于控制在工具表面上形成的低摩擦薄膜起著非常重要的作用。 2. 實(shí)驗(yàn)程序 如何準(zhǔn)備工具及工作材料,如何解釋,以及氯植入試驗(yàn). 2.1準(zhǔn)備工具 擲掉膠結(jié)碳化物工具被選為樣本。 在磨損表面，他們沒有芯片破裂而形成的三角形。這兩種形式與P10和P30膠結(jié)碳化物被當(dāng)作單純的工具材料。 為了調(diào)查陶瓷保護(hù)涂層在機(jī)器加工改進(jìn)方面的效果，TICN涂層替代錫層和Tic層作為多面超薄型被儲存。此點(diǎn)在后面的膠結(jié)碳化物P10型號中將被提到。 請注意 TiC應(yīng)固定于水泥涂抹層carbides中。 2.2氯植入 圖表1對氯離子注入切割工具過程進(jìn)行了描述。 工具標(biāo)本被裝在一個目標(biāo)操作中，并通過氯離子束的掃描。 離子束在自由離子源中由a1c13Freeman產(chǎn)生，通過蒸發(fā)器進(jìn)行大量的收集產(chǎn)生單一的容易控制的氯離子束。氯離子劑量經(jīng)常是ions/cm21.0X1017100，具有100keV的移入能源。氯離子植入到樣本側(cè)面和邊緣。 這一角度被正常的固定在工具表面，移入過程中，控制真空低于210X"5PA。 加熱離子束,束密度目前只限于 0.03-0.05A/m2全過程. 圖表1:氯離子注入切割工具。 2.3轉(zhuǎn)數(shù)測試 測驗(yàn)用于對干燥機(jī)加工能力的評定。切割的深度及強(qiáng)度都是固定不變的：深度為1.0毫米，強(qiáng)度為0.1毫米 / 轉(zhuǎn)，切割速度范圍為10米 / 分至500米 / 分。圖2說明工件和工具間的機(jī)械內(nèi)部運(yùn)作。車床裝有傳感器，可準(zhǔn)確測量出化學(xué)反應(yīng)及強(qiáng)度。兩種磨損表面在試驗(yàn)中被觀察：側(cè)翼寬(VB)和坑口寬（KT）。 s45c型號的鋼鐵，通過加入鈦進(jìn)行非氧化處理后用于做工具材料。其主要化學(xué)成份是0.44mass%C、0.34mass%Si, 0.80mass% Mn及0.01mass%Ti, 氧含量被控制在0.0011 mass %，其他成分磷、硫、銅、鎳、鉻被控制在低于0.001mass% 。 2.4定性 首次用激光顯微鏡觀察工具表面Tribo薄膜的形成. 工具表面各氧化物的形成通過EDS (能量色散光譜)進(jìn)行對照觀察。 圖表 2:該轉(zhuǎn)數(shù)測試中工件及工具間的機(jī)械互動。 3. 針對基本的鑄工具和TICN鍍鑄工具實(shí)驗(yàn)結(jié)果及討論內(nèi)容，調(diào)查干燥機(jī)氯離子注入工具材料的效果。 3.1基本鑄工具的氯離子注入 試驗(yàn)中，F(xiàn)c和Fs被測試用以估計(jì)摩擦系數(shù)。 圖3將基本的鑄工具及注入氯離子的鑄工具進(jìn)行對比，展示了經(jīng)提升的切割速度（Vc）?；镜蔫T工具的摩擦系數(shù)(U)界于40米 / 分和100米 / 分之間。例如 (I=0.8. Vc 大于100米 / 分時，Vc將穩(wěn)定下降。而注入氯離子的鑄工具Vc=300米 / 分 時達(dá)到最低速。例如,i=0.58而^ = 0.65為基本的鑄工具。高速切割范圍內(nèi)的較低摩擦系數(shù)可通過如今的氯離子注入方法實(shí)現(xiàn)。 3.2 氯離子注入到TICN涂層 在鈦的軸承工作試驗(yàn)中,自動注油過程較高的切割速度狀態(tài)下進(jìn)行。鈦氧化物的保護(hù)膜很難在工具材料上形成。由于鈦數(shù)量來源少。 另一方面,經(jīng)氯離子注入的陶瓷涂層鈦表面卻容易形成保護(hù)膜,像TICN。在CL-植入到TICN鍍工具的情況下，自動注油過程可以在所有切削速度中很好的工作. 圖表3: 基本的鑄工具與注入氯離子的鑄工具之間摩擦系數(shù)的對比 圖4對切割了500米長度后的TICN涂層及注入氯離子TICN涂層的鑄工具在各種切割速度下側(cè)面磨損寬度進(jìn)行對比。通過氯離子注入TICN涂層可大大減少側(cè)面磨損。Vc>300 米 / 分時，側(cè)面磨損將提供給TICN鍍鑄工具更多的Vc。干燥狀態(tài)下較高的切割速度，TICN涂層將會發(fā)生嚴(yán)重的氧化。而對于氯注入的TICN鑄工具，隨著切割速度的提高，側(cè)面磨損僅僅增加了其長度。尤其VB=55Jim, 在切割速度Vc=500米 / 分， 切割長度為500米。 圖表 4: TICN涂層及注入氯離子TICN涂層的鑄工具之間側(cè)面磨損度的對比 3.3形成Tribo薄膜 即使在較高切割速度下，側(cè)面磨損的大幅度減小很好的證明了自動注油過程在鈦氧化物薄膜上很有效的發(fā)揮了其作用。 圖表5顯示了在Vc=400米 / 分，切割長度達(dá)500米狀態(tài)后注入氯離子TICN的側(cè)表面的微觀結(jié)構(gòu)。側(cè)翼表面的切割邊緣表面形成薄膜。理論上, Belag可作為工具的保護(hù)層使用。一般來講，該類保護(hù)膜包括多種氧化物；工具的部分金屬成分在相對較高溫度下進(jìn)行切割時會被氧化。工件材料的組成部分，如鐵件容易氧化，而形成具有氧化薄膜的赤鐵礦。 圖表5:通過激光顯微鏡對工具表面進(jìn)行精確測量. 圖表6:Si, Mil, Ti Fe, anil O 在微觀圖表中的區(qū)別 本干燥\機(jī)所形成的薄膜,絕不是一個簡單的混合或氧化物的化合物.圖6描述了矽、錳、鈦、鐵和氧各成分在微觀圖表中的區(qū)分。圖5中所形成的薄膜分成兩個區(qū)域: 一區(qū)域薄膜主要由TiOX組成，而二區(qū)域薄膜主要由SiO2和MnO組成。一區(qū)域二區(qū)域都包含少量的鐵成分。在干燥機(jī)械過程中不存在側(cè)翼表面，因此通過激光顯微鏡所測試的側(cè)翼磨損寬度只包括一區(qū)。二區(qū)被認(rèn)為與經(jīng)氯離子注入TICN保護(hù)層而減少摩擦及損耗無關(guān)。在干燥機(jī)中通過氯離子的注入，原基礎(chǔ)鈦氧化物的形成與自動注油過程緊密相關(guān)。 4. 結(jié)論 氯離子注入切割工具。 干燥機(jī)的表現(xiàn)已通過干燥條件下，切割速度達(dá)500 米/分的范圍下經(jīng)轉(zhuǎn)數(shù)測試加以驗(yàn)證。氯離子注入基本的鑄工具后，摩擦系數(shù)及磨損度大大降低。在較高的切割速度范圍內(nèi)，側(cè)翼寬度遠(yuǎn)遠(yuǎn)超出100lim, Vc=500m / min, 而氯離子的注入可使VB達(dá)55Jim,干燥機(jī)tribological方面的改善應(yīng)歸功于形成的鈦氧化物薄膜的自動注油系統(tǒng)。 作者要感謝泰國的博士TAkhadejdamrong,MTech實(shí)驗(yàn)中對她的幫助. 這項(xiàng)研究部分項(xiàng)目得到了國家資助，是在無障礙過程中，無危險環(huán)境狀態(tài)下進(jìn)行的。